Above is a graph showing the distribution of earliest citations, decade-by-decade from the 20th century onwards, for each of the three major categories of General SF, SF Criticism, and SF Fandom. Thus, you can get a general sense of when SF terms were coined.

It should not be surprising that the 1930s–1950s was the big time for general SF vocabulary. It should perhaps also not be surprising that, proportionally speaking, the 1940s and '50s was the heyday of SF fandom, and that the 1970s–1990s saw a (relative) increase in terms relating to criticism.

Apart from that, we think it looks kind of cool.