Above is a graph showing the distribution of earliest citations, decade-by-decade during the 20th century, for each category. Thus, you can get a general sense of when SF terms were coined.
It should not be surprising that the 1930s-1950s was the big time for SF vocabulary. It should perhaps also not be surprising that, proportionally speaking, the 1940s and '50s was the heyday of SF fandom, and that the 1970s-1990s saw an increase in terms relating to criticism.
Apart from that, we think it looks kind of cool.